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Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science, 270)
| Full title: | Metal Impurities in Silicon- and Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact (Springer Series in Materials Science, 270) |
|---|---|
| ISBN: | 9783319939247 |
| ISBN 10: | 3319939246 |
| Authors: | Simoen, Eddy Claeys, Cor |
| Publisher: | Springer |
| Edition: | 1st ed. 2018 |
| Num. pages: | 471 |
| Binding: | Hardcover |
| Language: | de |
| Published on: | 2018 |
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